Research Fields

Micro-Engineering (MEMS)

Design and Simulation

Design and simulation is the main part of the experimental work, thus it is performed prior to the experimental studies. We have utilized the following softwares: ANYSYS, CoventorWare and Comsol-MEMS modules.

Fig. 1: Flow sensor operating via a Piezoresistive-based Boron-doped Watson bridge principle.

Fig. 2: Layout of designed accelerometers which are composed of gap changing and overlap area changing MEMS accelerometer.

Compliant-MEMS

Micro-compliant systems enable force and motion through elastic beams, and play an important role in MEMS due to their mechanical advantages. We are able to desgin and fabricate C-MEMS (Compliant-MEMS) to induce force magnification. We performed topografy optimization in order to improve response of the system for a given input.

Fig. 1: The view of compliant MEMS amplifier by optical microscope

Fig. 2: Reliability study on materials on micromirrors.

Microfabrication by Laser

Our purpose is to create periodic and controlled nano spike with femtosecond LASER on silicon surface without using any masks procedure which is used lithography and subsequent to etching dry or wet when, all of these levels are more expensive method in contrast with previous one.

Fig. 2: Scanning electron micrographs (SEM) of silicon surface formed by irradiation with 500fs, 515 nm, 21 µJ LASER pulses in distilled water. (Viewed at 30° to the surface normal).

Research Fields

Micro-Engineering (MEMS)

Design and Simulation

Fig. 1: Flow sensor operating via a Piezoresistive-based Boron-doped Watson bridge principle.

Fig. 2: Layout of designed accelerometers which are composed of gap changing and overlap area changing MEMS accelerometer.

Compliant-MEMS

Fig. 1: The view of compliant MEMS amplifier by optical microscope

Fig. 2: Reliability study on materials on micromirrors.

Microfabrication by Laser

Fig. 2: Scanning electron micrographs (SEM) of silicon surface formed by irradiation with 500fs, 515 nm, 21 µJ LASER pulses in distilled water. (Viewed at 30° to the surface normal).

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Research Fields

Micro-Engineering (MEMS)

Design and Simulation

Fig. 1: Flow sensor operating via a Piezoresistive-based Boron-doped Watson bridge principle.

Fig. 2: Layout of designed accelerometers which are composed of gap changing and overlap area changing MEMS accelerometer.

Compliant-MEMS

Fig. 1: The view of compliant MEMS amplifier by optical microscope

Fig. 2: Reliability study on materials on micromirrors.

Microfabrication by Laser

Fig. 2: Scanning electron micrographs (SEM) of silicon surface formed by irradiation with 500fs, 515 nm, 21 µJ LASER pulses in distilled water. (Viewed at 30° to the surface normal).

Map

Information

Networks