Clean Room Lab
- Mask aligner with UV and DUV (248 nm) light source
- ICP-DRIE
- PVD with e-beam, thermal evaporation, and DC sputtering capability
- Wet etching area: Spinner, hot plates, and other relevant pieces
- Optical microscope with a digital camera and fluorescence detection attachment
- Surface profilometer with 3-D image capture software
- Surface cleaner by plasma chamber
- Oven with vacuum capability
- Cell counting equipment
- Syringe system for microfludics
- SEM with EDX capability
- Macro-Centrifuge
- Vortexer
- Gold and Carbon Sputter
- Optical Microscope with LED light system
- Signal Generators for DEP forces
- UV Light-Curing Flood Lamp System
- Precision Balance
- RTP
- Deep Coater
- Direct Laser Writing Lithography
Note: Some equipment may be out of order. Please contact us first to check whether the instrument you need is avalaible or not.